KINETIC-ENERGY DISTRIBUTIONS OF SPUTTERED PARTICLES IN NON-CASCADE SPUTTERING PROCESSES

被引：11
|
作者：
ZIV, AR
KING, BV
LIN, SH
TSONG, IST
机构：
[1] ARIZONA STATE UNIV,DEPT PHYS,TEMPE,AZ 85287
[2] ARIZONA STATE UNIV,DEPT MATH,TEMPE,AZ 85287
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 218卷 / 1-3期
关键词：
D O I：
10.1016/0167-5087(83)91075-X
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：742 / 746
页数：5
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