ULTRAVIOLET PHOTO-DECOMPOSITION FOR METAL-DEPOSITION - GAS VERSUS SURFACE PHASE PROCESSES

被引：61
|
作者：
WOOD, TH
WHITE, JC
THACKER, BA
机构：
来源：
APPLIED PHYSICS LETTERS | 1983年 / 42卷 / 05期
关键词：
D O I：
10.1063/1.93957
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：408 / 410
页数：3
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