REFLECTIVITIES OF CHEMICAL-VAPOR DEPOSITION-DIAMOND MIRRORS IN THE VACUUM-ULTRAVIOLET REGION

被引：5
|
作者：
SASANO, T
ISHIGURO, E
MITANI, S
TOMIMORI, H
机构：
[1] DOSHISHA UNIV,FAC ENGN,KYOTO 61003,JAPAN
[2] OSAKA DIAMOND IND CO,DIV RES & DEV,SAKAI,OSAKA 593,JAPAN
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1995年 / 66卷 / 02期
关键词：
D O I：
10.1063/1.1145709
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Diamond mirrors have been fabricated by depositing a diamond thin film on a Si3N4 substrate by means of chemical vapor deposition (CVD). The reflectivities of the CVD diamond mirrors in the vacuum ultraviolet region from 30 to 2000 Å are reported and compared with those of SiC and gold-coated SiC mirrors measured in this work. The optical constants of the CVD diamond film are obtained from the reflectivities measured and also compared with those of a bulk crystal reported in the literature. © 1995 American Institute of Physics.
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收藏
页码：2211 / 2213
页数：3
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