REFLECTIVITIES OF CHEMICAL-VAPOR DEPOSITION-DIAMOND MIRRORS IN THE VACUUM-ULTRAVIOLET REGION

被引：5
|
作者：
SASANO, T
ISHIGURO, E
MITANI, S
TOMIMORI, H
机构：
[1] DOSHISHA UNIV,FAC ENGN,KYOTO 61003,JAPAN
[2] OSAKA DIAMOND IND CO,DIV RES & DEV,SAKAI,OSAKA 593,JAPAN
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1995年 / 66卷 / 02期
关键词：
D O I：
10.1063/1.1145709
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Diamond mirrors have been fabricated by depositing a diamond thin film on a Si3N4 substrate by means of chemical vapor deposition (CVD). The reflectivities of the CVD diamond mirrors in the vacuum ultraviolet region from 30 to 2000 Å are reported and compared with those of SiC and gold-coated SiC mirrors measured in this work. The optical constants of the CVD diamond film are obtained from the reflectivities measured and also compared with those of a bulk crystal reported in the literature. © 1995 American Institute of Physics.
引用
收藏
页码：2211 / 2213
页数：3
相关论文
共 50 条
  • [1] FABRICATION, CHARACTERISTICS, AND PERFORMANCE OF DIAMOND MIRRORS FOR VACUUM-ULTRAVIOLET EXCIMER LASERS
    KUROSAWA, K
    SONOUCHI, R
    YOKOTANI, A
    SASAKI, W
    KATTOH, M
    TAKIGAWA, Y
    NISHIMURA, K
    OPTICAL ENGINEERING, 1995, 34 (05) : 1405 - 1409
  • [2] Field-emission characteristics of chemical vapor deposition-diamond films
    Peng, XL
    THIN SOLID FILMS, 2000, 370 (1-2) : 63 - 69
  • [3] OPTICAL CHARACTERIZATIONS OF PHOTOINDUCED CHEMICAL-VAPOR-DEPOSITION PRODUCED SIO2-FILMS IN VACUUM-ULTRAVIOLET, ULTRAVIOLET, AND VISIBLE REGION
    KANASHIMA, T
    NAGAYOSHI, R
    OKUYAMA, M
    HAMAKAWA, Y
    JOURNAL OF APPLIED PHYSICS, 1993, 74 (09) : 5742 - 5747
  • [4] Infrared properties of chemical-vapor deposition polycrystalline diamond windows
    Dipartimento di Fisica, Ist. Naz. di Fisica della Materia, Univ. di Roma La Sapienza, Piazzale A. Moro 2, 00185 Rome, Italy
    不详
    不详
    不详
    不详
    Appl. Opt., 24 (5731-5736):
  • [5] Infrared properties of chemical-vapor deposition polycrystalline diamond windows
    Dore, P
    Nucara, A
    Cannavo, D
    De Marzi, G
    Calvani, P
    Marcelli, A
    Sussmann, RS
    Whitehead, AJ
    Dodge, CN
    Krehan, AJ
    Peters, HJ
    APPLIED OPTICS, 1998, 37 (24): : 5731 - 5736
  • [6] Diamond chemical-vapor deposition on optical fibers for fluorescence waveguiding
    Rabeau, JR
    Huntington, ST
    Greentree, AD
    Prawer, S
    APPLIED PHYSICS LETTERS, 2005, 86 (13) : 1 - 3
  • [7] (110)-ORIENTED DIAMOND FILMS SYNTHESIZED BY MICROWAVE CHEMICAL-VAPOR DEPOSITION
    KOBASHI, K
    NISHIMURA, K
    MIYATA, K
    KUMAGAI, K
    NAKAUE, A
    JOURNAL OF MATERIALS RESEARCH, 1990, 5 (11) : 2469 - 2482
  • [8] PHOTODISSOCIATION OF BRCN IN THE VACUUM-ULTRAVIOLET REGION
    KANDA, K
    KATSUMATA, S
    NAGATA, T
    OZAKI, Y
    KONDOW, T
    KUCHITSU, K
    HIRAYA, A
    SHOBATAKE, K
    CHEMICAL PHYSICS, 1993, 175 (2-3) : 399 - 411
  • [9] VACUUM ULTRAVIOLET DRIVEN CHEMICAL VAPOR-DEPOSITION
    CALLOWAY, AR
    SOLID STATE TECHNOLOGY, 1982, 25 (10) : 150 - 150
  • [10] Effect of the chemical nature of transition-metal substrates on chemical-vapor deposition of diamond
    Chen, X.
    Narayan, J.
    Journal of Applied Physics, 1993, 74 (06):
12345