CHARACTERIZATION OF MULTILAYER THIN-FILMS BY LASER-INDUCED THERMAL-DESORPTION MASS-SPECTROMETRY

被引：2

作者：

LAND, DP ^{[1
]}

TAI, TL ^{[1
]}

LINDQUIST, JM ^{[1
]}

HEMMINGER, JC ^{[1
]}

MCIVER, RT ^{[1
]}

机构：

[1] UNIV CALIF IRVINE,INST SURFACE & INTERFACE SCI,IRVINE,CA 92717

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 03期

关键词：

D O I：

10.1116/1.575623

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1024 / 1025

页数：2

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