CHARACTERIZATION OF MULTILAYER THIN-FILMS BY LASER-INDUCED THERMAL-DESORPTION MASS-SPECTROMETRY

被引：2
|
作者：
LAND, DP [1 ]
TAI, TL [1 ]
LINDQUIST, JM [1 ]
HEMMINGER, JC [1 ]
MCIVER, RT [1 ]
机构：
[1] UNIV CALIF IRVINE,INST SURFACE & INTERFACE SCI,IRVINE,CA 92717
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 03期
关键词：
D O I：
10.1116/1.575623
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：1024 / 1025
页数：2
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