THE MODIFICATION OF MATERIALS BY ION-IMPLANTATION

被引：5
|
作者：
DEARNALEY, G
机构：
来源：
PHYSICS IN TECHNOLOGY | 1983年 / 14卷 / 05期
关键词：
D O I：
10.1088/0305-4624/14/5/302
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
收藏
页码：225 / 232
页数：8
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