ATOMIC AND CARRIER PROFILES OF 1-MEV, 2-MEV, 4-MEV, AND 6-MEV SI-30 IMPLANTED INTO GAAS

被引：10
|
作者：
THOMPSON, PE
WILSON, RG
INGRAM, DC
PRONKO, PP
机构：
[1] HUGHES RES LABS,MALIBU,CA 90265
[2] UNIVERSAL ENERGY SYST,DAYTON,OH 45432
来源：
JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 08期
关键词：
D O I：
10.1063/1.342715
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：2986 / 2990
页数：5
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