THERMAL-DECOMPOSITION OF METALORGANIC COMPOUNDS USED IN THE MOCVD OF INP

被引：30

|

作者：

KARLICEK, R

LONG, JA

DONNELLY, VM

机构：

来源：

JOURNAL OF CRYSTAL GROWTH | 1984年 / 68卷 / 01期

关键词：

D O I：

10.1016/0022-0248(84)90406-8

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

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页码：123 / 127

页数：5

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