THERMAL-DECOMPOSITION OF METALORGANIC COMPOUNDS USED IN THE MOCVD OF INP

被引：30
|
作者：
KARLICEK, R
LONG, JA
DONNELLY, VM
机构：
来源：
JOURNAL OF CRYSTAL GROWTH | 1984年 / 68卷 / 01期
关键词：
D O I：
10.1016/0022-0248(84)90406-8
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
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页码：123 / 127
页数：5
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