MEASUREMENTS OF PARTICLE-SIZE KINETICS FROM NANOMETER TO MICROMETER SCALE IN A LOW-PRESSURE ARGON-SILANE RADIOFREQUENCY DISCHARGE

被引：180
|
作者：
BOUFENDI, L
PLAIN, A
BLONDEAU, JP
BOUCHOULE, A
LAURE, C
TOOGOOD, M
机构：
[1] Groupe de Recherche sur l'Energétique des Milieux Ionisés, Unité de Recherche Associée au CNRS (URA 831), UFR Sciences-Université d'Orléans, 45067 Orleans Cedex 02
来源：
APPLIED PHYSICS LETTERS | 1992年 / 60卷 / 02期
关键词：
D O I：
10.1063/1.106981
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The time evolution of the size of particles produced in a silane-argon low-pressure radio-frequency discharge has been determined in the nanometer to the micrometer range using transmission electron microscopy. Highly "monodisperse" distributions are observed and their temporal evolution is followed. These studies are combined with laser light scattering measurements to obtain particle densities, which are of the order of 10(7) cm3. For short plasma durations (DELTA-t < 5 s), a fast (10 nm/s) linear increase in diameter is measured.
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页码：169 / 171
页数：3
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