BORON-DIFFUSION IN SILICON FROM ULTRAFINE BORON SILICON POWDER

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作者：

GUPTA, A

WEST, GA

DONLAN, JP

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PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS | 1984年 / 459卷

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O43 [光学];

学科分类号：

070207 ; 0803 ;

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页码：94 / 102

页数：9

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