A COMPARISON OF TECHNIQUES FOR NONDESTRUCTIVE COMPOSITION MEASUREMENTS IN CDZNTE SUBSTRATES

被引:51
|
作者
TOBIN, SP
TOWER, JP
NORTON, PW
CHANDLERHOROWITZ, D
AMIRTHARAJ, PM
LOPES, VC
DUNCAN, WM
SYLLAIOS, AJ
ARD, CK
GILES, NC
LEE, J
BALASUBRAMANIAN, R
BOLLONG, AB
STEINER, TW
THEWALT, MLW
BOWEN, DK
TANNER, BK
机构
[1] NIST,GAITHERSBURG,MD 20899
[2] TEXAS INSTRUMENTS INC,DALLAS,TX 75265
[3] II VI INC,SAXONBURG,PA 16056
[4] W VIRGINIA UNIV,MORGANTOWN,WV 26506
[5] JOHNSON MATTHEY ELECTR,SPOKANE,WA 99216
[6] SIMON FRASER UNIV,BURNABY,BC V5A 1S6,CANADA
[7] UNIV WARWICK,COVENTRY CV4 7AL,W MIDLANDS,ENGLAND
[8] UNIV DURHAM,DURHAM DH3 1LE,ENGLAND
关键词
CDZNTE; HGCDTE; LATTICE CONSTANT; NONDESTRUCTIVE MEASUREMENTS; PHOTOLUMINESCENCE; PHOTOREFLECTANCE;
D O I
10.1007/BF02657981
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report an overview and a comparison of nondestructive optical techniques for determining alloy composition x in Cd1-xZnxTe substrates for HgCdTe epitaxy. The methods for single-point measurements include a new x-ray diffraction technique for precision lattice parameter measurements using a standard high-resolution diffractometer, room-temperature photoreflectance, and low-temperature photoluminescence. We compare measurements on the same set of samples by all three techniques. Comparisons of precision and accuracy, with a discussion of the strengths and weaknesses of different techniques, are presented. In addition, a new photoluminescence excitation technique for full-wafer imaging of composition variations is described.
引用
收藏
页码:697 / 705
页数:9
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