PAPERS FROM THE 7TH INTERNATIONAL VACUUM MICROELECTRONICS CONFERENCE - 4-7 JULY 1994, GRENOBLE, FRANCE - PREFACE

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BAPTIST, R

MEYER, R

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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1995年 / 13卷 / 02期

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TM [电工技术]; TN [电子技术、通信技术];

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0808 ; 0809 ;

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页码：402 / 402

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