SURFACE-COMPOSITION AND STRUCTURE CHANGES IN GAAS COMPOUNDS DUE TO LOW-ENERGY AR+ ION-BOMBARDMENT

被引：37
|
作者：
KANG, HJ
MOON, YM
KANG, TW
LEEM, JY
LEE, JJ
MA, DS
机构：
[1] DONG GUK UNIV,DEPT PHYS,SEOUL 100715,SOUTH KOREA
[2] ELECTR & TELECOMMUN RES INST,TAEJON,SOUTH KOREA
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 06期
关键词：
D O I：
10.1116/1.576344
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：3251 / 3255
页数：5
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