DISCHARGE-BASED ION-SOURCE (WITH HOLLOW-CATHODE)

被引：0
|
作者：
SEMENOV, AP
BATUEV, BSC
机构：
来源：
INSTRUMENTS AND EXPERIMENTAL TECHNIQUES | 1991年 / 34卷 / 01期
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T [工业技术];
学科分类号：
08 ;
摘要：
The authors describe a plasma ion source that is based on low-voltage low-pressure hollow-cathode discharge in a magnetic field. The ions from the discharge plasma are extracted through a wide aperture in the emitter cathode without the use of a screen to stabilize the emitting plasma surface. The aperture area is equal to the cross-sectional area of the widest discharge region. An ion beam with a current of 0.2 A is obtained with an accelerating potential of 10 kV and a discharge current of 2 A.
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页码：180 / 182
页数：3
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