THE INTERNAL-STRESS IN THIN SILVER, COPPER AND GOLD-FILMS

被引：150

|

作者：

ABERMANN, R

KOCH, R

机构：

来源：

THIN SOLID FILMS | 1985年 / 129卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(85)90096-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：71 / 78

页数：8

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