EFFECT OF CARBON AND OXYGEN PRECIPITATION ON GOLD DIFFUSION IN SILICON

被引：2
|
作者：
ITOH, Y
SUGITA, Y
NOZAKI, T
机构：
[1] TOYAMA UNIV,DEPT PHYS,TOYAMA 930,JAPAN
[2] KITAZATO UNIV,DEPT HYG SCI,SAGAMIHARA,KANAGAWA 228,JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1989年 / 28卷 / 10期
关键词：
D O I：
10.1143/JJAP.28.1746
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1746 / 1749
页数：4
相关论文
共 50 条
  • [1] INTERRELATION OF GOLD DIFFUSION AND OXYGEN PRECIPITATION IN SILICON
    VIGDOROVICH, VN
    KRYUKOV, VL
    FURMANOV, GP
    [J]. DOKLADY AKADEMII NAUK SSSR, 1991, 317 (02): : 359 - 363
  • [2] EFFECT OF CARBON ON OXYGEN PRECIPITATION IN SILICON
    SUN, Q
    YAO, KH
    LAGOWSKI, J
    GATOS, HC
    [J]. JOURNAL OF APPLIED PHYSICS, 1990, 67 (09) : 4313 - 4319
  • [3] EFFECT OF THE PRECIPITATION OF OXYGEN ON THE DIFFUSION OF COLD IN SILICON
    VLASOV, AA
    KRYUKOV, VL
    FURMANOV, GP
    CHESHUINA, SE
    [J]. INORGANIC MATERIALS, 1990, 26 (12) : 2280 - 2281
  • [4] Effect of carbon on oxygen precipitation in Czochralski silicon
    Londos, CA
    Potsidi, MS
    Emtsev, VV
    [J]. PHYSICA STATUS SOLIDI C - CONFERENCES AND CRITICAL REVIEWS, VOL 2, NO 6, 2005, 2 (06): : 1963 - 1967
  • [5] EFFECT OF OXYGEN PRECIPITATION ON PHOSPHORUS DIFFUSION IN CZOCHRALSKI SILICON
    AHN, ST
    KENNEL, HW
    PLUMMER, JD
    TILLER, WA
    REK, ZU
    STOCK, SR
    [J]. APPLIED PHYSICS LETTERS, 1988, 53 (01) : 34 - 36
  • [6] CARBON ENHANCEMENT EFFECT ON OXYGEN PRECIPITATION IN CZOCHRALSKI SILICON
    SHIMURA, F
    [J]. JOURNAL OF APPLIED PHYSICS, 1986, 59 (09) : 3251 - 3254
  • [7] Oxygen diffusion and precipitation in Czochralski silicon
    Newman, RC
    [J]. JOURNAL OF PHYSICS-CONDENSED MATTER, 2000, 12 (25) : R335 - R365
  • [8] ENHANCED OXYGEN DIFFUSION AND PRECIPITATION IN SILICON
    BERGHOLZ, W
    HUTCHISON, JL
    PIROUZ, P
    [J]. JOURNAL OF MICROSCOPY-OXFORD, 1986, 141 : 143 - 154
  • [9] Evidence for the effect of carbon on oxygen precipitation in Czochralski silicon crystal
    Liu, PD
    Ma, XU
    Zhang, JX
    Li, LB
    Que, DL
    [J]. JOURNAL OF APPLIED PHYSICS, 2000, 87 (08) : 3669 - 3673
  • [10] THE ROLE OF CARBON IN THE PRECIPITATION OF OXYGEN IN SILICON
    OEHRLEIN, GS
    CHALLOU, DJ
    JAWOROWSKI, AE
    CORBETT, JW
    [J]. PHYSICS LETTERS A, 1981, 86 (02) : 117 - 119
12345