DISLOCATION DENSITY AND SHEET RESISTANCE VARIATIONS ACROSS SEMI-INSULATING GAAS WAFERS

被引：10

作者：

BLUNT, RT ^{[1
]}

CLARK, S ^{[1
]}

STIRLAND, DJ ^{[1
]}

机构：

[1] UNIV CAMBRIDGE, QUEENS COLL, CAMBRIDGE, ENGLAND

来源：

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES | 1982年 / 30卷 / 07期

关键词：

D O I：

10.1109/TMTT.1982.1131181

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：943 / 949

页数：7

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