A COMPARISON BETWEEN PIXE AND RBS THIN-FILM THICKNESS MEASUREMENTS IN BINARY TARGETS

被引：13
|
作者：
OLIVER, A
MIRANDA, J
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 29卷 / 03期
关键词：
D O I：
10.1016/0168-583X(87)90063-2
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：521 / 526
页数：6
相关论文
共 50 条
  • [41] Measurements of thin-film elastic constants
    Hirao, Masahiko
    Ogi, Hirotsugu
    Nihon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A, 2009, 75 (752): : 397 - 403
  • [42] MEASUREMENTS OF THE WEAR OF A THIN-FILM DISK
    PHIPPS, PBP
    IEEE TRANSACTIONS ON MAGNETICS, 1990, 26 (05) : 2496 - 2498
  • [43] Measurements of Thin-Film Lasers.
    Zeidler, Guenter
    1600, (26):
  • [44] PICKING A SPECTROPHOTOMETER FOR THIN-FILM MEASUREMENTS
    ARMITAGE, P
    PHOTONICS SPECTRA, 1986, 20 (04) : 63 - &
  • [45] REFLECTION SPECTRUM FOR A THIN-FILM WITH NONUNIFORM THICKNESS
    PISARKIEWICZ, T
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1994, 27 (01) : 160 - 164
  • [46] WAFER MAPPER MEASURES THIN-FILM THICKNESS
    LEWOTSKY, K
    LASER FOCUS WORLD, 1995, 31 (03): : 34 - &
  • [47] RECENT TRENDS IN THIN-FILM THICKNESS MONITORING
    PULKER, HK
    VACUUM, 1987, 37 (3-4) : 379 - 380
  • [48] THIN-FILM THICKNESS MONITOR RANGE EXTENDER
    WILSON, FC
    SANDSTROM, DB
    SERREZE, HB
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1975, 46 (11): : 1593 - 1593
  • [49] OPTICAL THICKNESS MONITOR FOR THIN-FILM DEPOSITION
    DANEU, V
    APPLIED OPTICS, 1975, 14 (04): : 962 - 969
  • [50] Wafer mapper measures thin-film thickness
    Laser Focus World, 3 (34):
12345