A COMPARISON BETWEEN PIXE AND RBS THIN-FILM THICKNESS MEASUREMENTS IN BINARY TARGETS

被引：13
|
作者：
OLIVER, A
MIRANDA, J
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 29卷 / 03期
关键词：
D O I：
10.1016/0168-583X(87)90063-2
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：521 / 526
页数：6
相关论文
共 50 条
  • [1] THIN-FILM THICKNESS MEASUREMENTS
    KHATNIKOV, VI
    PRIBORY I TEKHNIKA EKSPERIMENTA, 1974, (06): : 194 - 195
  • [2] THE ROLE OF THE IONIZATION AND STOPPING CROSS-SECTIONS IN PIXE THIN-FILM THICKNESS MEASUREMENTS
    MIRANDA, J
    OLIVER, A
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 34 (03): : 362 - 368
  • [3] A NEW METHOD FOR THIN-FILM THICKNESS MEASUREMENT USING PIXE
    MIRANDA, J
    OLIVER, A
    MONTENEGRO, EC
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 43 (02): : 203 - 209
  • [4] THIN-FILM THICKNESS MEASUREMENTS WITH THERMAL WAVES
    ROSENCWAIG, A
    OPSAL, J
    WILLENBORG, DL
    JOURNAL DE PHYSIQUE, 1983, 44 (NC-6): : 483 - 489
  • [5] THIN-FILM THICKNESS MEASUREMENTS WITH THERMAL WAVES
    ROSENCWAIG, A
    OPSAL, J
    WILLENBORG, DL
    APPLIED PHYSICS LETTERS, 1983, 43 (02) : 166 - 168
  • [6] THIN-FILM THICKNESS MEASUREMENT - A COMPARISON OF VARIOUS TECHNIQUES
    PIEGARI, A
    MASETTI, E
    THIN SOLID FILMS, 1985, 124 (3-4) : 249 - 257
  • [7] RBS-PIXE ANALYSIS ON MU-M SCALE ON THIN-FILM HIGH-TC SUPERCONDUCTORS
    VANKAN, JA
    RECTOR, JH
    DAM, B
    VIS, RD
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 89 (1-4): : 204 - 207
  • [8] POSSIBILITIES AND LIMITATIONS OF STYLUS METHOD FOR THIN-FILM THICKNESS MEASUREMENTS
    ESCHBACH, HL
    VERHEYEN, F
    THIN SOLID FILMS, 1974, 21 (02) : 237 - 243
  • [9] A Review of Thin-film Thickness Measurements using Optical Methods
    Park, Jungjae
    Cho, Yong Jai
    Chegal, Won
    Lee, Joonyoung
    Jang, Yoon-Soo
    Jin, Jonghan
    INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 2024, 25 (08) : 1725 - 1737
  • [10] Heterodyne interferometer for film thickness and refractive index measurements of optical thin-film
    Shimizu, N
    Yuguchi, J
    Takahashi, H
    INTERNATIONAL SYMPOSIUM ON POLARIZATION ANALYSIS AND APPLICATIONS TO DEVICE TECHNOLOGY, 1996, 2873 : 123 - 126
12345