GAAS P-LAYER FORMATION BY BE ION-IMPLANTATION

被引：1
|
作者：
SUGATA, S
TSUKADA, N
NAKAJIMA, M
KURAMOTO, K
MITA, Y
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1983年 / 22卷 / 07期
关键词：
D O I：
10.1143/JJAP.22.L470
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：L470 / L472
页数：3
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