ANISOTROPIC ETCHING BEHAVIOR OF GALLIUM-ARSENIDE JUNCTIONS

被引：7
|
作者：
STIRLAND, DJ [1 ]
机构：
[1] PLESSEY CO LTD,ALLEN CLARK RES CTR,CASWELL,TOWCESTER,NORTHAMPTONSHIR,ENGLAND
来源：
JOURNAL OF MATERIALS SCIENCE | 1974年 / 9卷 / 06期
关键词：
D O I：
10.1007/BF00570391
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：969 / 980
页数：12
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