A TECHNIQUE FOR THE DETERMINATION OF STRESS IN THIN-FILMS

被引：154
|
作者：
BROMLEY, EI
RANDALL, JN
FLANDERS, DC
MOUNTAIN, RW
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1983年 / 1卷 / 04期
关键词：
D O I：
10.1116/1.582744
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：1364 / 1366
页数：3
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