AN ELLIPSOMETRY STUDY OF A HYDROGENATED AMORPHOUS-SILICON BASED N-I STRUCTURE

被引：32

作者：

COLLINS, RW ^{[1
]}

CLARK, AH ^{[1
]}

GUHA, S ^{[1
]}

HUANG, CY ^{[1
]}

机构：

[1] ENERGY CONVERS DEVICES INC,TROY,MI 48084

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 57卷 / 10期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1063/1.335361

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4566 / 4571

页数：6

共 50 条

[1] INFRARED ELLIPSOMETRY STUDY OF THE OXIDATION MECHANISMS OF HYDROGENATED AMORPHOUS-SILICON
BLAYO, N
DREVILLON, B
[J]. SURFACE SCIENCE, 1992, 260 (1-3) : 37 - 43
[2] INSITU STUDY OF THE GROWTH OF HYDROGENATED AMORPHOUS-SILICON BY INFRARED ELLIPSOMETRY
BLAYO, N
DREVILLON, B
[J]. APPLIED PHYSICS LETTERS, 1991, 59 (08) : 950 - 952
[3] OXIDATION AND ETCHING OF HYDROGENATED AMORPHOUS-SILICON - AN INSITU ELLIPSOMETRY STUDY
COLLINS, RW
HUANG, CY
WINDISCHMANN, H
[J]. SOLAR ENERGY MATERIALS, 1985, 12 (04): : 289 - 298
[4] INFLUENCE OF SUBSTRATE STRUCTURE ON THE GROWTH OF HYDROGENATED AMORPHOUS-SILICON STUDIED BY INSITU ELLIPSOMETRY
COLLINS, RW
CAVESE, JM
[J]. JOURNAL OF APPLIED PHYSICS, 1986, 60 (12) : 4169 - 4176
[5] KINETIC ELLIPSOMETRY STUDY OF THE HYDROGEN PLASMA-ETCHING OF HYDROGENATED AMORPHOUS-SILICON FILMS
GODET, C
DREVILLON, B
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (04): : 2482 - 2489
[6] INFRARED ELLIPSOMETRY STUDY OF THE VIBRATIONAL PROPERTIES AND THE GROWTH OF HYDROGENATED AMORPHOUS-SILICON ULTRATHIN FILMS
DREVILLON, B
BENFERHAT, R
[J]. JOURNAL OF APPLIED PHYSICS, 1988, 63 (10) : 5088 - 5091
[7] STUDY BY ELLIPSOMETRY OF VIBRATIONAL PROPERTIES OF VERY THIN-FILMS OF HYDROGENATED AMORPHOUS-SILICON
BENFERHAT, R
DREVILLON, B
[J]. ANNALES DE CHIMIE-SCIENCE DES MATERIAUX, 1987, 12 (4-5): : 385 - 388
[8] ELECTRONIC-STRUCTURE OF HYDROGENATED AMORPHOUS-SILICON
ADLER, D
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1987, 90 (1-3) : 77 - 89
[9] STRAIN DEPENDENCE OF P-I-N HYDROGENATED AMORPHOUS-SILICON JUNCTIONS
UTSUNOMIYA, M
YOSHIDA, A
[J]. APPLIED PHYSICS LETTERS, 1988, 53 (23) : 2296 - 2298
[10] ELECTROLUMINESCENCE FROM HYDROGENATED AMORPHOUS-SILICON P-I-N-DIODES
HAN, DX
WANG, KD
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1995, 190 (1-2) : 74 - 84

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