INFLUENCE OF SUBSTRATE STRUCTURE ON THE GROWTH OF HYDROGENATED AMORPHOUS-SILICON STUDIED BY INSITU ELLIPSOMETRY

被引：7

|

作者：

COLLINS, RW

CAVESE, JM

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 60卷 / 12期

关键词：

D O I：

10.1063/1.337501

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：4169 / 4176

页数：8

相关论文

共 50 条

[1] INSITU STUDY OF THE GROWTH OF HYDROGENATED AMORPHOUS-SILICON BY INFRARED ELLIPSOMETRY
BLAYO, N
DREVILLON, B
[J]. APPLIED PHYSICS LETTERS, 1991, 59 (08) : 950 - 952
[2] EFFECT OF HYDROGEN DILUTION ON THE GROWTH OF HYDROGENATED AMORPHOUS-SILICON STUDIED BY INSITU PHASE-MODULATED ELLIPSOMETRY
CANILLAS, A
CAMPMANY, J
ANDUJAR, JL
BERTRAN, E
[J]. THIN SOLID FILMS, 1993, 228 (1-2) : 109 - 112
[3] INFLUENCE OF THE SUBSTRATE ON THE EARLY STAGE OF THE GROWTH OF HYDROGENATED AMORPHOUS-SILICON EVIDENCED BY KINETIC ELLIPSOMETRY
ANTOINE, AM
DREVILLON, B
[J]. JOURNAL OF APPLIED PHYSICS, 1988, 63 (02) : 360 - 367
[4] INSITU ELLIPSOMETRY STUDIES OF THE GROWTH OF HYDROGENATED AMORPHOUS-SILICON BY GLOW-DISCHARGE
COLLINS, RW
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03): : 514 - 517
[5] OXIDATION AND ETCHING OF HYDROGENATED AMORPHOUS-SILICON - AN INSITU ELLIPSOMETRY STUDY
COLLINS, RW
HUANG, CY
WINDISCHMANN, H
[J]. SOLAR ENERGY MATERIALS, 1985, 12 (04): : 289 - 298
[6] INSITU STUDIES OF THE GROWTH OF HYDROGENATED AMORPHOUS-SILICON
DREVILLON, B
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1989, 114 : 139 - 144
[7] AN ELLIPSOMETRY STUDY OF A HYDROGENATED AMORPHOUS-SILICON BASED N-I STRUCTURE
COLLINS, RW
CLARK, AH
GUHA, S
HUANG, CY
[J]. JOURNAL OF APPLIED PHYSICS, 1985, 57 (10) : 4566 - 4571
[8] INTERACTION BETWEEN GROWING AMORPHOUS-SILICON AND GLASS SUBSTRATE EVIDENCED BY INSITU INFRARED ELLIPSOMETRY
BLAYO, N
DREVILLON, B
[J]. APPLIED PHYSICS LETTERS, 1990, 57 (08) : 786 - 788
[9] AN INSITU ELLIPSOMETRY STUDY OF AMORPHOUS-SILICON AMORPHOUS-GERMANIUM MULTILAYERS
CHU, V
FANG, M
DREVILLON, B
[J]. JOURNAL OF APPLIED PHYSICS, 1991, 69 (01) : 13 - 18
[10] INFRARED ELLIPSOMETRY STUDY OF THE OXIDATION MECHANISMS OF HYDROGENATED AMORPHOUS-SILICON
BLAYO, N
DREVILLON, B
[J]. SURFACE SCIENCE, 1992, 260 (1-3) : 37 - 43

← 1 2 3 4 5 →