共 50 条
- [41] Fabrication of High Piezoelectric PZT-based Thin Films by Sputtering Method [J]. 2012 WORLD AUTOMATION CONGRESS (WAC), 2012,
- [46] MICROSTRUCTURE AND PIEZOELECTRIC PROPERTIES OF PZT BASED CERAMICS [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1989, 28 : 77 - 79
- [49] Micromachining of PZT-based MEMS [J]. AMERICAN CERAMIC SOCIETY BULLETIN, 2003, 82 (01): : 30 - 34
- [50] Design Optimization of PZT-Based Piezoelectric Cantilever Beam by Using Computational Experiments [J]. Journal of Electronic Materials, 2016, 45 : 3848 - 3858