A REVIEW OF THE EPITAXIAL-GROWTH OF COMPOUND AND ALLOY SEMICONDUCTORS BY SPUTTER DEPOSITION

被引：1

作者：

GREENE, JE ^{[1
]}

机构：

[1] UNIV ILLINOIS,MAT RES LAB,DEPT MET,URBANA,IL 61801

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1984年 / 2卷 / 02期

关键词：

D O I：

10.1116/1.572358

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：427 / 427

页数：1

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