MORPHOLOGY OF THIN POLYIMIDE FILMS

被引：4
|
作者：
DANEV, G [1 ]
SPASSOVA, E [1 ]
POPOVA, K [1 ]
机构：
[1] BULGARIAN ACAD SCI,INST ELECTR,BU-1784 SOFIA,BULGARIA
来源：
THIN SOLID FILMS | 1993年 / 228卷 / 1-2期
关键词：
D O I：
10.1016/0040-6090(93)90621-U
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A morphology of thin polyimide films prepared from polyamic acid solution has been investigated by scanning electron microscopy. A strong dependence between the conditions of post-preparation temperature treatment (imidization) and the structure and optical properties of the films has been found. The films exhibit a large optical anisotropy and well-defined columnar structure. This structure is supposed to explain the ''polyimide grass'' observed after reactive ion etching in an O2 atmosphere. Some techniques are proposed to avoid this effect in high yield microfabrication.
引用
收藏
页码：301 / 303
页数：3
相关论文
共 50 条
  • [21] ELECTRON VIBRATIONAL SPECTROSCOPY OF THIN POLYIMIDE FILMS
    DINARDO, NJ
    DEMUTH, JE
    CLARKE, TC
    JOURNAL OF CHEMICAL PHYSICS, 1986, 85 (11): : 6739 - 6749
  • [22] Influence of polyimide substrates on the composition, morphology, and crystalline nature of sputter-deposited NiTi thin films
    Charleston, Jonathan
    Agrawal, Arpit
    Zhao, Yao
    Mirzaeifar, Reza
    SENSORS AND ACTUATORS A-PHYSICAL, 2023, 357
  • [23] Polyimide-based scintillating thin films
    Quaranta, A
    Carturan, S
    Maggioni, G
    Milazzo, PM
    Abbondanno, U
    Della Mea, G
    Gramegna, E
    Pieri, U
    IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 2001, 48 (02) : 219 - 224
  • [24] Atomic layer deposition of polyimide thin films
    Putkonen, Matti
    Harjuoja, Jenni
    Sajavaara, Timo
    Niinisto, Lauri
    JOURNAL OF MATERIALS CHEMISTRY, 2007, 17 (07) : 664 - 669
  • [25] FRICTION AND WEAR OF POLYIMIDE THIN-FILMS
    CHITSAZZADEH, MR
    EISS, NS
    WEAR, 1986, 110 (3-4) : 359 - 368
  • [26] Optical anisotropy of flexible polyimide thin films
    Li, BZ
    He, TB
    Ding, MX
    Zhang, P
    Gao, FB
    Jing, F
    JOURNAL OF MATERIALS RESEARCH, 1998, 13 (05) : 1368 - 1372
  • [27] THIN POLYIMIDE FILMS FOR DIELECTRIC INTERLAYER APPLICATION
    Damaceanu, Mariana-Dana
    Rusu, Radu-Dan
    Bruma, Maria
    Muller, Alexandru
    CAS: 2009 INTERNATIONAL SEMICONDUCTOR CONFERENCE, VOLS 1 AND 2, PROCEEDINGS, 2009, : 351 - +
  • [28] Polyimide/sepiolite nanocomposite films: Preparation, morphology and properties
    Yu, Yun
    Qi, Shengli
    Zhan, Jiayu
    Wu, Zhanpeng
    Yang, Xiaoping
    Wu, Dezhen
    MATERIALS RESEARCH BULLETIN, 2011, 46 (10) : 1593 - 1599
  • [29] MORPHOLOGY AND CRYSTALLINITY OF KAPTON-H POLYIMIDE FILMS
    FREIDA, JE
    GARDNER, KH
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1989, 197 : 46 - ACSC
  • [30] STRUCTURE AND MORPHOLOGY OF ION-IMPLANTED POLYIMIDE FILMS
    YOSHIDA, K
    IWAKI, M
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 : 878 - 881
12345