DEEP-UV SPATIAL-FREQUENCY DOUBLING BY COMBINING MULTILAYER MIRRORS WITH DIFFRACTION GRATINGS

被引：7
|
作者：
HAWRYLUK, AM
SMITH, HI
EHRLICH, DJ
机构：
[1] MIT,DEPT ELECT ENGN & COMP SCI,ELECTR RES LAB,CAMBRIDGE,MA 02139
[2] MIT,LINCOLN LAB,LEXINGTON,MA 02173
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1983年 / 1卷 / 04期
关键词：
D O I：
10.1116/1.582745
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：1200 / 1203
页数：4
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