PHOTOCONDUCTANCE MINORITY-CARRIER LIFETIME VS SURFACE PHOTOVOLTAGE DIFFUSION LENGTH IN SILICON

被引:17
|
作者
BUCZKOWSKI, A [1 ]
ROZGONYI, G [1 ]
SHIMURA, F [1 ]
MISHRA, K [1 ]
机构
[1] MEMC ELECTR MAT INC,ST PETERS,MO 63376
关键词
D O I
10.1149/1.2221017
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
Recombination lifetime and diffusion length measured with the photoconductance decay and surface photovoltage techniques are compared theoretically and experimentally, and reasons for possible discrepancies are discussed. Specific examples are given which show that, if full advantage of these noncontact and nondestructive procedures is to be taken, it is necessary that surface recombination be considered in the analysis of any experimental data. This is particularly true for samples where the diffusion length is greater than one-fourth of the wafer thickness, a condition for which it is essential that theoretical algorithms for separating the bulk and surface components of recombination be developed.
引用
收藏
页码:3240 / 3245
页数:6
相关论文
共 50 条
  • [31] ON THE EFFECTIVE MINORITY-CARRIER DIFFUSION LENGTH OF POLYCRYSTALLINE SILICON SOLAR-CELLS
    KUMARI, S
    JAIN, SK
    DAS, BK
    JAIN, GC
    SOLAR CELLS, 1983, 9 (03): : 209 - 214
  • [32] INFLUENCE OF RAPID THERMAL-PROCESSING ON MINORITY-CARRIER DIFFUSION LENGTH IN SILICON
    EICHAMMER, WA
    VU, TQ
    SIFFERT, P
    RAPID THERMAL ANNEALING / CHEMICAL VAPOR DEPOSITION AND INTEGRATED PROCESSING, 1989, 146 : 185 - 190
  • [33] MEASUREMENT OF LOCAL MINORITY-CARRIER DIFFUSION LENGTH AND LIFETIME BY AN AC-EBIC METHOD
    ROMANOWSKI, A
    KORDAS, L
    MULAK, A
    SCANNING, 1989, 11 (05) : 207 - 212
  • [34] Investigating minority-carrier lifetime in small spherical Si using microwave photoconductance decay
    Liu, Zhengxin
    Masuda, Atsushi
    Kondo, Michio
    JOURNAL OF APPLIED PHYSICS, 2008, 103 (10)
  • [35] DEPENDENCE OF MINORITY-CARRIER RECOMBINATION LIFETIME ON SURFACE MICROROUGHNESS IN SILICON-WAFERS
    DAIO, H
    SHIMURA, F
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1993, 32 (12B): : L1792 - L1794
  • [36] EFFECTS OF PROCESS INDUCED DISLOCATIONS AND PHOSPHORUS DIFFUSION ON MINORITY-CARRIER GENERATION LIFETIME IN SILICON
    LIANG, AY
    VARKER, CJ
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (03) : C131 - C131
  • [37] Investigating minority-carrier lifetime in small spherical Si using microwave photoconductance decay
    Liu, Zhengxin
    Masuda, Atsushi
    Kondo, Michio
    Journal of Applied Physics, 2008, 103 (10):
  • [38] Measuring the Minority-Carrier Diffusion Length of n-Type In0.53Ga0.47As Epilayers Using Surface Photovoltage
    Ping Li
    Hengjing Tang
    Tao Li
    Xue Li
    Xiumei Shao
    Tibor Pavelka
    Li Huang
    Haimei Gong
    Journal of Electronic Materials, 2017, 46 : 2061 - 2066
  • [39] Measuring the Minority-Carrier Diffusion Length of n-Type In0.53Ga0.47As Epilayers Using Surface Photovoltage
    Li, Ping
    Tang, Hengjing
    Li, Tao
    Li, Xue
    Shao, Xiumei
    Pavelka, Tibor
    Huang, Li
    Gong, Haimei
    JOURNAL OF ELECTRONIC MATERIALS, 2017, 46 (04) : 2061 - 2066
  • [40] Quantitative analysis of copper contamination in silicon by surface photovoltage minority carrier lifetime analysis
    Ramappa, DA
    Hoff, AM
    Henley, WB
    CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY 2000, INTERNATIONAL CONFERENCE, 2001, 550 : 215 - 219