EPITAXIAL-GROWTH OF DIAMOND ON DIAMOND SUBSTRATE BY PLASMA ASSISTED CVD

被引:93
|
作者
KAMO, M
YURIMOTO, H
SATO, Y
机构
[1] UNIV TSUKUBA,INST GEOSCI,TSUKUBA,IBARAKI 305,JAPAN
[2] NATL INST RES INORGAN MAT,TSUKUBA,IBARAKI 305,JAPAN
关键词
D O I
10.1016/0169-4332(88)90352-2
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:553 / 560
页数:8
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