STUDIES OF CORROSIVE OUTGASSES FROM VIA HOLES USING THERMAL-DESORPTION SPECTROSCOPY

被引：2

作者：

TOKITOH, S ^{[1
]}

UCHIDA, H ^{[1
]}

OKUNO, Y ^{[1
]}

LIU, GL ^{[1
]}

SAKAYA, Y ^{[1
]}

HIRASHITA, N ^{[1
]}

机构：

[1] OKI ELECT IND CO LTD,CTR PROC TECHNOL,HACHIOJI,TOKYO 193,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1995年 / 34卷 / 2B期

关键词：

THERMAL DESORPTION SPECTROSCOPY; CORROSIVE OUTGASSING; VIA HOLE; SPIN-ON-GLASS; AMMONIA DESORPTION; OCCLUSION OF AMMONIA;

D O I：

10.1143/JJAP.34.1021

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This work reveals the presence of corrosive outgassing from via holes in multiinterdielectric structures with inorganic spin-on-glass (SOG) films using thermal desorption spectroscopy. Main species of the corrosive outgassing are found to be H2O, NH3 and HF. The amount of NH3 desorption reaches 5-10% of water desorption. Significant amounts of H2O and NH3 are found to be desorbed from the SOG films. The desorption of NH3 results from occlusion of the species into the SOG film through the via holes.

引用

页码：1021 / 1025

页数：5

共 50 条

[1] Studies of corrosive outgasses from via holes using thermal desorption spectroscopy
[J]. Tokitoh, Shunichi, 1600, JJAP, Minato-ku, Japan (34):
[2] DESORPTION STUDIES OF HYDROGEN AND CARBON-MONOXIDE FROM NICKEL SURFACES USING THERMAL-DESORPTION SPECTROSCOPY
CABRERA, AL
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (04): : 3229 - 3236
[3] STUDY OF MICROSURFACES USING THERMAL-DESORPTION SPECTROSCOPY
THOMAS, ME
POPPA, H
POUND, GM
[J]. THIN SOLID FILMS, 1979, 58 (02) : 273 - 279
[4] DIRECT ANALYSIS OF CONTAMINATION IN SUBMICRON CONTACT HOLES BY THERMAL-DESORPTION SPECTROSCOPY
AOKI, H
TERAOKA, Y
IKAWA, E
KIKKAWA, T
NISHIYAMA, I
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (01): : 42 - 46
[5] THERMAL-DESORPTION SPECTROSCOPY ON SILICON
KLEINT, C
BRZOSKA, KD
[J]. SURFACE SCIENCE, 1990, 231 (1-2) : 177 - 187
[6] THERMAL-DESORPTION SPECTROSCOPY OF HE FROM NI AT AND BELOW SATURATION
EHRENBERG, J
SCHERZER, BMU
BEHRISCH, R
[J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1983, 78 (1-4): : 405 - 416
[7] THERMAL-DESORPTION SPECTROSCOPY OF PALLADIUM AND COPPER ON SILICA
PIERCE, DE
BURNS, RP
GABRIEL, KA
[J]. THIN SOLID FILMS, 1991, 206 (1-2) : 340 - 344
[8] FIELD-EMISSION THERMAL-DESORPTION SPECTROSCOPY
DEROCHETTE, JM
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1982, 53 (01): : 34 - 37
[9] THERMAL-DESORPTION SPECTROSCOPY OF SPUTTERED MOSX FILMS
PIERCE, DE
BURNS, RP
DAUPLAISE, HM
MIZERKA, LJ
[J]. TRIBOLOGY TRANSACTIONS, 1991, 34 (02) : 205 - 214
[10] THERMAL-DESORPTION AND PHOTOELECTRON-SPECTROSCOPY STUDIES OF BENZENE ADSORBED ON POLYCRYSTALLINE RHENIUM
ALNOT, M
DUCROS, R
EHRHARDT, JJ
TATARENKO, S
[J]. APPLICATIONS OF SURFACE SCIENCE, 1982, 14 (01): : 114 - 121

← 1 2 3 4 5 →