THERMAL-DESORPTION SPECTROSCOPY OF PALLADIUM AND COPPER ON SILICA

被引:13
|
作者
PIERCE, DE [1 ]
BURNS, RP [1 ]
GABRIEL, KA [1 ]
机构
[1] USA,MAT TECHNOL LAB,WATERTOWN,MA 02172
关键词
D O I
10.1016/0040-6090(91)90447-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Thermal desorption spectroscopy of palladium and copper films grown on clean silica substrates was performed using CO2 laser heating. After cleaning the surface by high temperature heating, a controlled, low coverage dose of metal atoms was deposited on the substrate. Temperature ramping was achieved using a constant laser power, the value of which depended on the nature of the metal and substrate as well as the substrate size. At high temperatures (above 1025 K for palladium and above 975 K for copper), metal films vaporize and desorption spectra provide information about the nature of the metal deposit and metal-support interaction. With increasing coverage of palladium on silica, a positive temperature shift in the leading edge of desorption was seen. At higher coverages, above about 2 x 10(15) atoms cm-2, a common leading edge appears and zero-order kinetic analysis gave E(act) values between 3.9 and 4.3 +/- 0.1 eV which can be compared with the value of 3.83 eV for DELTA-H(vap)(1200 K) for palladium metal. Similar coverage-dependent properties were not seen for copper on silica; instead. a common desorption leading edge appeared down to submonolayer coverages. Zero-order analysis at about 1 x 10(15) atoms cm-2 gave an E(act) of 3.3 +/- 0.1 eV. which is comparable with the value of 3.44 eV for DELTA-H(vap)(1100 K) for copper metal.
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页码:340 / 344
页数:5
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