SPUTTERING OF SIO2 IN O2-AR ATMOSPHERES

被引：12
|
作者：
SANTAMARIA, J
IBORRA, E
QUESADA, FS
DIAZ, GG
VIDAL, MR
机构：
[1] Univ Complutense, Madrid, Spain, Univ Complutense, Madrid, Spain
来源：
THIN SOLID FILMS | 1986年 / 139卷 / 02期
关键词：
The authors wish to express their thanks to Dr. D. Hodgson of the Junta de Energia Nuclear for many stimulating discussions and suggestions during the writing of this article. The work was partially supported by the Spanish Comision Asesora de Investigaci6n Ci6ntifica y T6cnica; project; 599/81;
D O I：
10.1016/0040-6090(86)90338-X
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
19
引用
收藏
页码：201 / 208
页数：8
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