FORMATION OF THIN POLYMER FILMS IN A GLOW DISCHARGE

被引：16
|
作者：
WILLIAMS, T
HAYES, MW
机构：
来源：
NATURE | 1967年 / 216卷 / 5115期
关键词：
D O I：
10.1038/216614a0
中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
引用
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页码：614 / &
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