PLASMA METAL ETCHING FOR HIGH-YIELD IN A PRODUCTION ENVIRONMENT

被引：0
|
作者：
FOUTS, S [1 ]
VOGEL, D [1 ]
机构：
[1] INTEL CORP,SANTA CLARA,CA 95051
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1983年 / 130卷 / 03期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C83 / C83
页数：1
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