AN ION-SOURCE WITH PLASMA GENERATOR

被引：11
|
作者：
YABE, E
TAKESHIRO, S
SUNAKO, K
TAKAYAMA, K
FUKUI, R
TAKAGI, K
OKAMOTO, K
KOMIYA, S
机构：
[1] TOKAI UNIV,DEPT PHYS,HIRATSUKA,KANAGAWA 25912,JAPAN
[2] ULVAC CORP,DIV RES & DEV,KANAGAWA 253,JAPAN
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1985年 / 6卷 / 1-2期
关键词：
D O I：
10.1016/0168-583X(85)90620-2
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：119 / 122
页数：4
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