AN ION-SOURCE WITH PLASMA GENERATOR

被引：11

作者：

YABE, E

TAKESHIRO, S

SUNAKO, K

TAKAYAMA, K

FUKUI, R

TAKAGI, K

OKAMOTO, K

KOMIYA, S

机构：

[1] TOKAI UNIV,DEPT PHYS,HIRATSUKA,KANAGAWA 25912,JAPAN

[2] ULVAC CORP,DIV RES & DEV,KANAGAWA 253,JAPAN

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1985年 / 6卷 / 1-2期

关键词：

D O I：

10.1016/0168-583X(85)90620-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：119 / 122

页数：4

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