AN INDUSTRY-WIDE EVALUATION OF ION IMPLANT DOSING ACCURACY

被引：7

|

作者：

LARSON, LA

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1988年 / 135卷 / 07期

关键词：

D O I：

10.1149/1.2096134

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

收藏

页码：1802 / 1805

页数：4

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