COMPARISON OF ACCURACY OF VARIOUS AES METHODS FOR QUANTITATIVE-ANALYSIS OF REFRACTORY-METAL SILICIDES

被引：10
|
作者：
ZAGORENKO, AI
ZAPOROZCHENKO, VI
机构：
来源：
SURFACE AND INTERFACE ANALYSIS | 1991年 / 17卷 / 05期
关键词：
D O I：
10.1002/sia.740170504
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The aim of the present paper is to compare experimentally the existing methods of quantitative Auger analysis based on several approaches: published sensitivity factors, our own sensitivity factors, matrix correction, first principles calculation. Various methods were used to measure the intensity of Auger lines and to calculate the parameters of Auger emission. The results obtained enabled the most accurate algorithm for quantitative analysis of refractory metal silicides to be selected. The measuring error was reduced to < 3%, which is much lower than the error usually obtained in quantitative AES.
引用
收藏
页码：237 / 244
页数：8
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