HIGH-QUALITY THIN GRADED DIELECTRIC SILICON OXYNITRIDE FILMS

被引：0
|
作者：
STEIN, KJ [1 ]
SUN, JYC [1 ]
NGUYEN, TN [1 ]
机构：
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 11期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C626 / C626
页数：1
相关论文
共 50 条
  • [31] Paramagnetic point defects in silicon nitride and silicon oxynitride thin films on silicon
    Warren, WL
    Kanicki, J
    Poindexter, EH
    [J]. COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS, 1996, 115 : 311 - 317
  • [32] HIGH-QUALITY CMOS IN THIN (100 NM) SILICON ON SAPPHIRE
    GARCIA, GA
    REEDY, RE
    BURGENER, ML
    [J]. IEEE ELECTRON DEVICE LETTERS, 1988, 9 (01) : 32 - 34
  • [33] HIGH-QUALITY FILMS OF GAAS ON SILICON ON INSULATOR GROWN BY MOCVD
    VERNON, S
    HAVEN, V
    BUNKER, S
    ABERNATHY, CR
    CARUSO, R
    SHORT, KT
    CHU, SNG
    BROWN, JM
    PEARTON, SJ
    [J]. JOURNAL OF ELECTRONIC MATERIALS, 1987, 16 (04) : A26 - A26
  • [34] HEAT-SOURCE POWER REQUIREMENTS FOR HIGH-QUALITY RECRYSTALLIZATION OF THIN SILICON FILMS FOR ELECTRONIC DEVICES
    MIAOULIS, IN
    MIKIC, BB
    [J]. JOURNAL OF APPLIED PHYSICS, 1986, 59 (05) : 1658 - 1662
  • [35] Fabrication of High-Quality Boron-Doped Microcrystalline Silicon Thin Films on Several Types of Substrates
    Yin, Yunfeng
    Long, Jidong
    Venkataraj, Selvaraj
    Wang, Juan
    Aberle, Armin G.
    [J]. PV ASIA PACIFIC CONFERENCE 2011, 2012, 25 : 34 - 42
  • [36] Structural and dielectric properties of oxynitride perovskite LaTiOxNy thin films
    Ziani, A.
    Le Paven-Thivet, C.
    Le Gendre, L.
    Fasquelle, D.
    Carru, J. C.
    Tessier, F.
    Pinel, J.
    [J]. THIN SOLID FILMS, 2008, 517 (02) : 544 - 549
  • [37] High-Quality Heteroepitaxial Growth of Thin Films of the Perovskite Oxynitride CaTaO2N: Importance of Interfacial Symmetry Matching between Films and Substrates
    Wakasugi, Takuto
    Hirose, Yasushi
    Nakao, Shoichiro
    Sugisawa, Yuki
    Sekiba, Daiichiro
    Hasegawa, Tetsuya
    [J]. ACS OMEGA, 2020, 5 (22): : 13396 - 13402
  • [38] Nanoscale Design of High-Quality Epitaxial Aurivillius Thin Films
    Gradauskaite, Elzbieta
    Gray, Natascha
    Campanini, Marco
    Rossell, Marta D.
    Trassin, Morgan
    [J]. CHEMISTRY OF MATERIALS, 2021, 33 (23) : 9439 - 9446
  • [39] Biexciton luminescence in high-quality ZnO epitaxial thin films
    Yamamoto, A
    Miyajima, K
    Goto, T
    Ko, HJ
    Yao, T
    [J]. JOURNAL OF APPLIED PHYSICS, 2001, 90 (10) : 4973 - 4976
  • [40] ON THE HIGH-QUALITY DIELECTRIC RESONATORS
    BRAGINSKII, VB
    VIATCHANIN, SP
    [J]. DOKLADY AKADEMII NAUK SSSR, 1980, 252 (03): : 584 - 585
12345