RAMAN MICROPROBE ANALYSIS DURING THE DIRECT LASER WRITING OF SILICON MICROSTRUCTURES

被引：10
|
作者：
MAGNOTTA, F
HERMAN, IP
机构：
来源：
APPLIED PHYSICS LETTERS | 1986年 / 48卷 / 02期
关键词：
D O I：
10.1063/1.96941
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：195 / 197
页数：3
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