PROPERTIES OF RF-SPUTTERED BERYLLIUM THIN-FILMS

被引：2
|
作者：
PAULSON, WM [1 ]
LORIGAN, RP [1 ]
机构：
[1] MOTOROLA INC,SEMICONDUCTOR RES & DEV LAB,PHOENIX,AZ 85001
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1977年 / 14卷 / 01期
关键词：
D O I：
10.1116/1.569124
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：210 / 218
页数：9
相关论文
共 50 条
  • [21] STRUCTURAL AND ELECTRICAL-PROPERTIES OF RF-SPUTTERED AMORPHOUS BARIUM-TITANATE THIN-FILMS
    SREENIVAS, K
    MANSINGH, A
    SAYER, M
    JOURNAL OF APPLIED PHYSICS, 1987, 62 (11) : 4475 - 4481
  • [22] PHYSICAL AND MICROMAGNETIC STRUCTURAL CHARACTERIZATIONS OF RF-SPUTTERED AMORPHOUS COZRNB THIN-FILMS
    CHOH, KK
    JUDY, JH
    SIVERTSEN, JM
    JOURNAL OF APPLIED PHYSICS, 1988, 64 (10) : 5495 - 5497
  • [23] PHOTOLUMINESCENCE OF CR-3+ IONS IN RF-SPUTTERED YGG THIN-FILMS
    YAMAGA, M
    MARSHALL, A
    ODONNELL, KP
    HENDERSON, B
    MIYAZAKI, Y
    JOURNAL OF LUMINESCENCE, 1988, 39 (06) : 335 - 341
  • [24] ATOMIC DEFECTS AND STRESSES IN RF-SPUTTERED SIO2 THIN-FILMS
    SHABALOV, AL
    FELDMAN, MS
    THIN SOLID FILMS, 1986, 143 (01) : 83 - 90
  • [25] STUDY OF THE COERCIVE POWER OF RF-SPUTTERED IRON-OXIDE THIN-FILMS
    YU, M
    YOU, GJ
    ZHOU, ZJ
    LUO, HL
    CHINESE PHYSICS, 1988, 8 (03): : 593 - 601
  • [26] PIEZOELECTRIC THIN-FILMS OF RF-SPUTTERED BI12PBO19
    MITSUYU, T
    WASA, K
    HAYAKAWA, S
    JOURNAL OF APPLIED PHYSICS, 1976, 47 (07) : 2901 - 2902
  • [27] ELECTRICAL-RESISTIVITY OF RF-SPUTTERED IRON-OXIDE THIN-FILMS
    MEI, Y
    ZHOU, ZJ
    LUO, HL
    JOURNAL OF APPLIED PHYSICS, 1987, 61 (08) : 4388 - 4389
  • [28] TEXTURE FORMATION AND MAGNETIC-PROPERTIES OF RF-SPUTTERED COCRTA-CR LONGITUDINAL THIN-FILMS
    HSU, Y
    SIVERTSEN, JM
    JUDY, JH
    IEEE TRANSACTIONS ON MAGNETICS, 1990, 26 (05) : 1599 - 1601
  • [29] MECHANICAL AND ELECTRICAL-PROPERTIES OF RF-SPUTTERED LAB6 THIN-FILMS ON GLASS SUBSTRATES
    KAJIWARA, T
    URAKABE, T
    SANO, K
    FUKUYAMA, K
    WATANABE, K
    BABA, S
    NAKANO, T
    KINBARA, A
    VACUUM, 1990, 41 (4-6) : 1224 - 1228
  • [30] PROPERTIES OF RF-SPUTTERED ZINC-OXIDE BASED THIN-FILMS MADE FROM DIFFERENT TARGETS
    MARTINEZ, MA
    HERRERO, J
    GUTIERREZ, MT
    SOLAR ENERGY MATERIALS AND SOLAR CELLS, 1994, 31 (04) : 489 - 498
12345