PROPERTIES OF TIN DOPED INDIUM OXIDE THIN-FILMS PREPARED BY MAGNETRON SPUTTERING

被引：251
|
作者：
RAY, S
BANERJEE, R
BASU, N
BATABYAL, AK
BARUA, AK
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1983年 / 54卷 / 06期
关键词：
D O I：
10.1063/1.332415
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：3497 / 3501
页数：5
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