MEASUREMENT OF CHARACTERISTICS OF RADIATION BEAMS FROM DIFFRACTION IMAGES OF PERIODIC STRUCTURES

被引：0
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作者：
EPISHIN, VA
NEOFITNYI, MV
机构：
来源：
SOVIET JOURNAL OF OPTICAL TECHNOLOGY | 1989年 / 56卷 / 04期
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中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
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页码：193 / 195
页数：3
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