SUBSTRATE SURFACE EFFECT ON THE LASER-INDUCED PLASMA CHARACTERISTICS FOR THIN-FILM DEPOSITION

被引：3
|
作者：
PREDTECHENSKY, MR
BULGAKOV, AV
MAYOROV, AP
ROSHCHIN, AV
机构：
[1] Institute of Thermophysics, Novosibirsk
来源：
APPLIED SUPERCONDUCTIVITY | 1993年 / 1卷 / 10-12期
关键词：
D O I：
10.1016/0964-1807(93)90347-5
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The method for deposited flow with substrate interaction investigation named as ''Knudsen mesh'' method is developed. The substrate surface effect on laser plasma plume under condition corresponding to YBaCuO film deposition is studied by this method used in conjunction with time-of-flight mass spectrometry. The plume characteristics near surface (particle composition and velocities, shock layer formation dynamics) are obtained. It is found that oxygen containing clusters are formed effectively within shock layer near substrate.
引用
收藏
页码：1995 / 2003
页数：9
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