DIFFUSION PUMP TECHNOLOGY

被引：0

作者：

HABLANIAN, MH ^{[1
]}

机构：

[1] NRC OPERATION,VARIAN VACUUM DIV,121 HARTWELL AVE,LEXINGTON,MA 02173

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中图分类号：

O59 [应用物理学];

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引用

页码：25 / 31

页数：7

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