IMPURITY ANALYSIS IN FILMS OF SILICON-OXIDE AND NITRIDE ON A SILICON BEDLOAD

被引：0
|
作者：
YUDELEVICH, IG [1 ]
SHELPAKO.IR [1 ]
BUYANOVA, LM [1 ]
CHUCHALI.LS [1 ]
SHCHERBA.OI [1 ]
SEREDNYA.TP [1 ]
ZELENTSO.LV [1 ]
机构：
[1] ACAD SCI USSR, INORG CHEM INST, NOVOSIBIRSK, USSR
来源：
ZHURNAL ANALITICHESKOI KHIMII | 1974年 / 29卷 / 03期
关键词：
D O I：
暂无
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
引用
收藏
页码：518 / 521
页数：4
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