LASER CALORIMETER FOR UV ABSORPTION MEASUREMENT OF DIELECTRIC THIN-FILMS

We describe a dual-technique laser calorimeter for measuring the absorption of dielectric thin films in the UV region below 400 nm. The instrument measures the temperature rise and absorption of a sample simultaneously by two independent techniques, namely, a resistance thermometer and a temperature transducer. The absorption constant beta and extinction coefficient kappa of Sb2O3 and ZrO2 films at 308 and 337 nm are measured by using the calorimeter. The principle, construction, and application of the calorimeter are described.